Both SIMS and RBS techniques are used to obtain smooth accurate concen
tration profiles of silver diffused into soda-lime glass systems. By a
computer simulation, a combination of the two techniques enables more
detailed information to be obtained on the silver distribution at a d
epth of up to several micrometres, and the concentration profiles can
be used effectively for testing the reliability of some optical behavi
our characterizations of glass waveguiding structures.