2DEG IN STRAINED SI SIGE HETEROSTRUCTURES

Low-temperature magnetotransport properties for the recent n-type modu lation-doped Si/SiGe heterostructures are reported. The biaxially tens ile-stressed (100)Si surface layers on stress-relieved SiGe substrates are shown to have all the well known MOSFET characteristics but with more than an order of magnitude higher mobility. The four-fold degener acy of the ground subband can be completely resolved at a magnetic fie ld as low as 2 T. FQHE at 2/3 and 4/3 are clearly discerned and the ac tivation energy at the plateaus is about 1 K at 10 T. The ratios betwe en scattering time and single-particle relaxation time are 4-10 for a great number of samples examined. Low-temperature mobility appears to be capped below 2 x 10(5) cm2 V-1 s-1 at present, as reported from sev eral laboratories. Comparison of data and model calculations of Stem a nd Laux for the temperature-dependent mobility are made. Fixed charge and surface roughness appear to be the limiting parameters for the sam ples currently examined.