Copper phthalocyanine-titanium oxide (CuPc-TiO(x)) heteromultilayers h
ave been fabricated by evaporation and reactive evaporation techniques
, and their structural and optoelectronic properties investigated. X-r
ay diffraction and secondary ion mass spectroscopy confirm the formati
on of a clear alternating layered structure on a nanometer scale. An i
nterface roughness of 7 angstrom has been achieved for a multilayer wi
th an artificial period of 40 angstrom. Atomic force microscopy at scr
atched edges of the multilayers reveal double-layered structures of Ti
O(x) on CuPc, indicating the existence of two kinds of interface. Tran
sverse photoconduction measurements on samples deposited on SnO2-coate
d glass, using a back electrode of Al, show the occurrence of electron
transfer from CuPc to TiO(x) at the interfaces.