SPECTROSCOPIC ELLIPSOMETRY STUDIES OF INDIUM TIN OXIDE AND OTHER FLAT-PANEL DISPLAY MULTILAYER MATERIALS

Variable angle of incidence spectroscopic ellipsometry (VASE(R)) is a rapid and powerful non-destructive optical technique often used to ch aracterize thin films and multilayered structures. A monochromatic, li nearly polarized beam of light is reflected from a sample surface at a known angle of incidence, and the resulting polarization state of the reflected beam is measured as a function of wavelength and angle of i ncidence. Acquired data are then used to determine the optical constan ts, film thicknesses, and other parameters in the assumed model for th e sample. The VASE(R) experiment is particularly useful for the charac terization of materials for flat panel displays. In the present work, we demonstrate the use of VASE(R) on several specific materials for di splay applications: conducting indium tin oxide (ITO), hydrogenated am orphous silicon, and silicon dioxide, all deposited onto glass substra tes.