Ml. Terranova et al., GROWTH METHODOLOGIES AND CHARACTERIZATION OF DIFFERENT POLYCRYSTALLINE DIAMOND FILMS ON TA SUBSTRATES, Thin solid films, 241(1-2), 1994, pp. 340-343
The results of research undertaken with the aim of setting up a proced
ure for coating tantalum plates with good quality diamond films are pr
esented. The deposition was carried out using a hot filament chemical
vapour deposition technique from mixtures of methane and hydrogen. The
morphology of the deposits was characterized by scanning electron mic
roscopy and replica transmission electron microscopy, while the struct
ural properties were analysed by reflection high energy electron diffr
action. The effects of modification of the substrate surface on both t
he nucleation density and growth rates of diamond crystallites were in
vestigated. Deposition experiments were carried out using ''as receive
d'' and variously treated Ta substrates. A suitable choice of experime
ntal conditions allowed us to obtain fine grained and oriented polycry
stalline diamond coatings. Good adhesion to the substrate can be achie
ved by employing a particular procedure at the end of the deposition p
rocess.