DISCHARGE MECHANISM OF THE KYOTO-UNIVERSITY-TYPE MICROWAVE PLASMA CATHODE OR MICROWAVE ION-SOURCE

In this paper the discharge mechanism of the Kyoto University-type mic rowave plasma cathode is studied. The relationship between the electro n-absorbed power p(e) and electron impact frequency gamma(c) is obtain ed. When B = 875 G, p(e) decreases with the increment of gamma(c). At the same time when gamma(c) --> 0 or gamma(c) much less than omega, el ectron cyclotron resonance (ECR) discharge will be set up. When B > 87 5 G and gamma(c) = 10(7)-10(-8) s-1, the off-resonance discharge exist s. With gamma(c) increased up to a certain limit, it follows that when omega(z)/gamma=omega = (2 x 3(-1/2))1/2omega, a new type of discharge , the so-called double resonance (DR) discharge, occurs. For the Kyoto University-type MPC or MIS, the off-resonance discharge and DR discha rge can be satisfied and it is verified by experiment.