THE STUDY OF A 2.45-GHZ PLASMA SOURCE AS A PLASMA GENERATOR FOR THE SCECR ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE

The 2.45 GHz plasma source is a multicusp electron cyclotron resonance source with a tuned single mode microwave cavity. This is a bright pl asma source with a well characterized operating mode and plasma parame ters [A. K. Srivastava, et al., Rev. Sci. Instrum. 63, 2556 (1992); A. K. Srivastava and J. Asmussen, J. Vac. Sci. Technol. A 11, 1307 (1993 )]. The superconducting electron cyclotron resonance (SCECR) is a full y superconducting, hexapole stabilized tandem mirror ion source with a multimode microwave cavity. It is a high charge state ion source with extensive beam diagnostics [T. A. Antaya, Nucl. Instrum. Methods B 40 /41, 1024 (1989)]. The coupling of these two sources permits a number of fundamental studies important to both classes of ion sources. The 2 .4 GHz plasma source will be used to study the effects of ion or elect ron (or both) density enhancement on the charge state distribution, to tal extracted current, and ion energy distributions of the SCECR. The SCECR in tum will be used as a test stand to measure directly the ion distribution and beam characteristics of the 2.45 GHz plasma source. T he first results with this hybrid ion source will be presented at this conference.