A HIGH-INTENSITY SPUTTER NEGATIVE-ION SOURCE WITH MULTITARGET POSITIONS AND TARGET SCANNERS

The source is based on the principle put forward by Middleton, but mod ified significantly to a multifunction version for variant application s. It is equipped with a spherical molybdenum ionizer, an eight-positi on target wheel, and a special Cs vapor nozzle. Due to the special des ign, target changing and scanning are carried out only by means of rot ations, to simplify the mechanism and automatic control procedures. Th e tube for transmitting Cs vapor, as a resistance, is connected in ser ies in the ionizer supply circuit to reach a high enough temperature f or the vapor to pass. Details of the mechanical design, operation mode s, and test results are given.