Sx. Zheng et al., A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC-FIELD ANODE, Review of scientific instruments, 65(4), 1994, pp. 1331-1333
A study of a small unbalanced magnetron source with a multipole cusp m
agnetic field anode is described. The coaxial magnetron principle was
extended to the small unbalanced planar magnetron source. In the radia
l arrangement of magnets, the S pole of the magnet is directed toward
the center of the permanent magnet annulus, and the core of the magnet
ized mild steel was only 5 mm in diameter. Such a construction of the
unbalanced magnet arrangement makes the magnetron sputtering target as
small as 34 mm in diameter, and increases the sputtering area of the
target to 60%. The multipole magnetic field put in the anode can make
the unbalanced magnetron source run in a higher discharge current at a
lower arc voltage condition after beginning the arc discharge at a hi
gher beginning arc voltage.