USE OF ELECTRON-GUN TO REGULATE THE RADIOFREQUENCY PLASMA PERFORMANCEAND BEAM OPTICS

Citation
Me. Abdelaziz et al., USE OF ELECTRON-GUN TO REGULATE THE RADIOFREQUENCY PLASMA PERFORMANCEAND BEAM OPTICS, Review of scientific instruments, 65(4), 1994, pp. 1454-1456
Citations number
6
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
ISSN journal
00346748
Volume
65
Issue
4
Year of publication
1994
Part
2
Pages
1454 - 1456
Database
ISI
SICI code
0034-6748(1994)65:4<1454:UOETRT>2.0.ZU;2-K
Abstract
The addition of electrons in both rf plasma and ion beam extracted fro m a rf ion source enhanced the source's performance and beam optics. T he increase of plasma intensity increases the charge state of the extr acted ions. The mixing of electrons with the ions within the ion beam decreases the space charge effect on beam expansion.