Using an optical spectroscopy analyzer (OSA), the emission spectra of
XeCl-excimer-laser-produced plasma near a YBa2Cu3O7-x (YBCO) target su
rface were measured. The difference of the emission spectra with and w
ithout dc glow discharge was investigated. The results show that dc gl
ow discharge plasma can significantly increase the emission intensity
of atomic oxygen and increase emission intensities of atomic ions, but
there are no obvious effects for metal atoms and metal oxides. Enhanc
ement of chemical activity of the laser plasma with dc discharge may b
e due mainly to the increase of concentration of atomic oxygen.