DEVELOPMENT OF A COMPACT HIGH-BRIGHTNESS X-RAY SOURCE

Based on the concept of interacting electron with intense light stored in a supercavity, a compact and high brightness soft X-ray source has been proposed for lithography at ILT/ILE. For the purpose of enhancin g the collision frequency of electron-photon beams, the idea of a comb ination of a supercavity pumped by a cw diode laser with an electrosta tic dc accelerator has been put forward, for which a high average spec tral brightness of 1.79 x 10(17) with a wavelength of 9.8 angstrom, an d a bandwidth of 0.17% can be expected. Two other upgraded systems for the production of high peak brightness X-ray radiation and high brigh tness gamma-ray radiation have also been proposed, which are based on an ultrahigh power laser (2 TW, 5 ps) and a compact electron storage r ing (300 MeV/89.3 mA). Meanwhile, the prototype laser undulator system and the current experiments on photon storage in a Fabry-Perot cavity pumped by a high power mode-locked Nd: YAG laser (25 MW, 89.25 MHz) a re introduced.