QUANTITATION OF SEM EBIC AND CL SIGNALS USING MONTE-CARLO ELECTRON-TRAJECTORY SIMULATIONS

A microcomputer Monte Carlo program simulates electron trajectories in solids and describes the distribution of energy deposited throughout the energy-dissipation (electron-hole pair generation) volume. From th is distribution, the electron-beam-induced current or cathodoluminesce nce signal that will be generated can be calculated for the chosen bea m conditions in a multilayer specimen of any geometry and compositions . The use of this program is illustrated by applications (1) to simula te curves of cathodoluminescence intensity versus beam energy for fitt ing to experimental data to evaluate materials and device parameters, (2) to calculate the energy deposited in each layer of a HEMT structur e in which electron-beam-induced current studies are in progress, and (3) to the simulation of defect contrast linescan profiles which are c ompared to experimental observations.