CONTAMINATION IN A SCANNING ELECTRON-MICROSCOPE AND THE INFLUENCE OF SPECIMEN COOLING

Authors
HIRSCH P KASSENS M PUTTMANN M REIMER L
Citation
P. Hirsch et al., CONTAMINATION IN A SCANNING ELECTRON-MICROSCOPE AND THE INFLUENCE OF SPECIMEN COOLING, Scanning, 16(2), 1994, pp. 101-110
Citations number
25
Categorie Soggetti
Microscopy
Journal title
Scanning → ACNP
ISSN journal
01610457
Volume
16
Issue
2
Year of publication
1994
Pages
101 - 110
Database
ISI
SICI code
0161-0457(1994)16:2<101:CIASEA>2.0.ZU;2-K
Abstract
Solutions of the stationary and time-dependent equations of diffusion are presented for contamination when scanning a rectangular area in th e scanning electron microscope (SEM). A method is described to record the thickness of the contamination layer by the signal of secondary or backscattered electrons and to measure the influence of electron curr ent density, beam energy, and specimen cooling on the contamination ra te.