Nucleation and growth of palladium clusters on MgO(100) have been stud
ied, in situ, under UHV by using the diffraction of thermal energy hel
ium atoms from the MgO surface. The width of the diffuse scattering ba
nd around the growing clusters has been precisely determined. It is eq
ual to 1.1 +/- 0.15 nm and does not depend either on the temperature o
r on the size of the clusters (in the range 2.5-7.5 nm). From the atte
nuation curves of the diffraction peaks, the variations of the number
density and of the mean size of the clusters are obtained in a single
experiment that is a great improvement regarding the classical ex situ
TEM studies. Results are compared with the nucleation and growth theo
ries.