The morphology of atomically stepped hillocks formed during homoepitax
ial growth on Ag(111) is analysed by SPALEED in the deposition range o
f 0-20 monolayers (ML). At 220 K the inclination of the facets increas
es linearly with coverage, with the terrace widths being corresponding
ly reduced. Facets with (100)-like steps are preferred over those cont
aining (111)-like steps resulting in a more triangular shape of the hi
llocks. At room temperature the hexagonally shaped hillocks are larger
owing to enhanced terrace widths. Moreover, the beginning interlayer
diffusion limits the height of the hillocks to approximately 10 layers
effecting a much slower reduction of the terrace widths after deposit
ion of 3.7 ML.