SELF-ORGANIZATION PHENOMENA DURING POROUS SILICON FORMATION

In the system of electrolyte (hydrofluoric acid - HF-48 %)-silicon (ph osphorus doped, specific resistivity is equal to 4.5 OMEGA.cm) the sel f-organization phenomena were discovered and investigated which are de veloped during the pores formation and show themselves in formation of periodic concentric structures of closepacked array of pores of two k inds: circular and radial. Experimentally obtained current-potential c haracteristic is S-formed. The surface of porous silicon, which was fo rmed by different conditions, is investigated.