PARAMETERS OF A LOW-FREQUENCY DISCHARGE PLASMA OF CF3BR-AR MIXTURE INA DIODE PLASMA REACTOR

The parameters of the low-frequency (40 kHz) discharge plasma of a CF3 Br-Ar mixture in a diode plasmochemical reactor were measured. The pla sma was investigated by mass spectrometry and a time-resolved probing technique. The specific features of the probe diagnostics under the ex perimental conditions were analyzed; the factors necessary for the acc urate analysis of the probe voltage-current characteristics were deter mined. Experimentally obtained data on the concentrations of charged s pecies, the mean electron energy, the electric field, and the electric energy distribution function depending on the composition of the mixt ure are presented; the mass-spectra of the positive and the negative i ons are discussed.