QUANTITATIVE TEXTURE AND DEFECT ANALYSIS OF POLYCRYSTALLINE DIAMOND FILMS BY ION CHANNELING

For the characterization of anisotropic polycrystalline diamond (PCD) films the ion channeling technique was employed. The angular dependenc e of backscattered protons from the PCD samples and from diamond singl e crystals was investigated. The convolution of the measured angular y ield of the diamond single crystals with assumed orientational distrib utions of the PCD film crystallites yields a formula which was used to fit the present measurements and to derive structural parameters of t he orientational distribution. Additional contributions to the dechann eling in the polycrystals, due to lattice defects, microtwins, amorpho us clusters or grain boundaries, were described by a defect parameter lambda and could separately be deduced by comparing single- and polycr ystal angular yields.