Fr. Riedijk et al., AN INTEGRATED OPTICAL POSITION-SENSITIVE DETECTOR WITH DIGITAL OUTPUTAND ERROR-CORRECTION, Sensors and actuators. A, Physical, 40(3), 1994, pp. 237-242
An integrated optical position-sensitive detector (PSD) with digital o
utput is presented. A novel interpolating analog-to-digital converter,
which is based on a sigma-delta converter, is applied to perform thre
e operations simultaneously. These are: calculation of the relative po
sition; cancellation of errors, both optical and electrical; generatio
n of a microprocessor-compatible digital output. The realized smart se
nsor is integrated in a standard bipolar IC process, and measures 6.5
mm x 2.5 mm.