An ultra-high vacuum scanning electron microscope (UHV-SEM) has been u
sed to study sub-monolayers of Cs on Si(100) surface. Cs adsorption on
the surface causes a considerable change in the work function. Covera
ges below 1/2 monolayer (ML) have been estimated by correlating the wo
rk function changes with the secondary electron (SE) signal. It has be
en found that this signal is sensitive down to similar to 0.005 ML whe
n the sample is biassed to a few hundred volts. Electron trajectories
from a biassed sample have been simulated for electrons originating fr
om different areas with different work functions across the sample. Th
is indicates that variations in coverage can be determined by secondar
y electron imaging provided these coverages are less than 1/2 ML. The
diffusion of Cs (< 1/2 ML) above room temperature has been studied usi
ng the biassed-SE imaging technique. Observed diffusion profiles have
unusual features including two linear regions. These can be explained
by a model which contains two competing adsorption sites, and includes
blocking of the diffusion paths by other Cs atoms.