THERMAL INVESTIGATION OF MONOLITHIC STRUCTURES

Authors
KOHARI Z CSENDES A SZEKELY V RENCZ M
Citation
Z. Kohari et al., THERMAL INVESTIGATION OF MONOLITHIC STRUCTURES, Microelectronics, 28(3), 1997, pp. 317-325
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics → ACNP
ISSN journal
00262692
Volume
28
Issue
3
Year of publication
1997
Pages
317 - 325
Database
ISI
SICI code
0026-2692(1997)28:3<317:TIOMS>2.0.ZU;2-Q
Abstract
In this paper a comparison of a thermal investigation of typical IC st ructures and a microstructure sample using different methods will be p resented. Different simulation methods and, for the IC structure, liqu id crystal measurements are compared. The results show that for the in vestigated structures there are possibilities other than using robust and resource consuming FEM tools. (C) 1997 Elsevier Science Ltd.