THERMAL CHARACTERIZATION OF MICROSYSTEMS BY MEANS OF HIGH-RESOLUTION THERMOGRAPHY

Thermal measurements on microsystems prove difficult due to small ther mal masses and high thermal gradients, namely on thermally powered act uators. Compared with contacting thermometry or integration of thermal ly sensitive structures, thermography as a two-dimensional method may be a very powerful and exact method of measuring device temperatures a nd heat fields. The load capacity of interconnection lines, a bimetal micro actuator, and the development of a thermopneumatical actuator, a re reported as examples for successful employment of infrared thermogr aphy in microtechnology. (C) 1997 Elsevier Science Ltd.