APPLICATION OF COMPUTER-BASED THERMOGRAPHY TO THERMAL MEASUREMENTS OFINTEGRATED-CIRCUITS AND POWER DEVICES

This paper presents the possibilities and the main problems of thermog raphy in VLSI circuits and power devices design and measurement. It is focused on emissivity correction, noise and other measuring difficult ies. Advanced new methods of surveys with the use of thermography are also presented. Combining infrared and video images gives the addition al possibility of thermography applications. A new method of scan shor tening allows the use of infrared cameras for the purpose of investiga ting shore transient thermal states. The applications of image process ing algorithms like filtering and averaging in computer-controlled the rmography systems are also discussed. (C) 1997 Elsevier Science Ltd.