NEW APPLICATIONS OF ADVANCED THIN-FILM MEASUREMENT BY SPECTROSCOPIC ELLIPSOMETRY

Authors
KEEFER M JOHNSON G
Citation
M. Keefer et G. Johnson, NEW APPLICATIONS OF ADVANCED THIN-FILM MEASUREMENT BY SPECTROSCOPIC ELLIPSOMETRY, Microelectronics, 28(3), 1997, pp. 9-12
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics → ACNP
ISSN journal
00262692
Volume
28
Issue
3
Year of publication
1997
Pages
9 - 12
Database
ISI
SICI code
0026-2692(1997)28:3<9:NAOATM>2.0.ZU;2-E