SPUTTERED MOLYBDENUM OXIDE THIN-FILMS FOR NH3 DETECTION

Authors
MUTSCHALL D HOLZNER K OBERMEIER E
Citation
D. Mutschall et al., SPUTTERED MOLYBDENUM OXIDE THIN-FILMS FOR NH3 DETECTION, Sensors and actuators. B, Chemical, 36(1-3), 1996, pp. 320-324
Citations number
13
Categorie Soggetti
Electrochemistry,"Chemistry Analytical","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
36
Issue
1-3
Year of publication
1996
Pages
320 - 324
Database
ISI
SICI code
0925-4005(1996)36:1-3<320:SMOTFN>2.0.ZU;2-5
Abstract
Thin films of MoO3 for gas sensing applications have been deposited by reactive sputtering using a metallic molybdenum target. After anneali ng at 500 degrees C in air, the layers consist of rhombic molybdenum t rioxide with a (010) texture. The morphology of the layers considerabl y depends on the film thickness. Electrical conductivity measurements with different test gases show that MoO3 layers are suitable for NH3 d etection at operating temperatures between 400 and 450 degrees C.