DOPING EFFECT OF SNO2 ON GAS-SENSING CHARACTERISTICS OF SPUTTERED ZNOTHIN-FILM CHEMICAL SENSOR

Authors
NANTO H MORITA T HABARA H KONDO K DOUGUCHI Y MINAMI T
Citation
H. Nanto et al., DOPING EFFECT OF SNO2 ON GAS-SENSING CHARACTERISTICS OF SPUTTERED ZNOTHIN-FILM CHEMICAL SENSOR, Sensors and actuators. B, Chemical, 36(1-3), 1996, pp. 384-387
Citations number
6
Categorie Soggetti
Electrochemistry,"Chemistry Analytical","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
36
Issue
1-3
Year of publication
1996
Pages
384 - 387
Database
ISI
SICI code
0925-4005(1996)36:1-3<384:DEOSOG>2.0.ZU;2-0
Abstract
The SnO2 content dependence of the sensitivity of sputtered SnO2-doped ZnO thin film chemical sensor is studied for various gases. It is fou nd that the SnO2(78 wt%)-doped ZnO thin film chemical sensor exhibits a high sensitivity and good selectivity for C2H5OH gas. The sensitivit y of the SnO2(78 wt%)-doped ZnO thin film chemical sensor responds to the freshness change of alcohols, indicating that the sensor is useful for freshness detection of alcohols.