THE ENHANCEMENT OF WEAR LIFE AND MOISTURE RESISTANCE OF SPUTTERED MOS2 FILMS BY METAL-ION IMPLANTATION

In the present paper, studies of the effects of metal ion (Y+, Ag+) im plantation on the tribology and moisture resistance of r.f.-sputtered MoS2 films are reported. The scratch test indicates an improved film-s ubstrate adherence. This is mainly attributed to the mixing interface which was caused by metal ion implantation. The tribological test resu lts indicate that metal ion implantation improves the wear life of the sputtered MoS2 films in an atmosphere of 60-70% relative humidity (RH ) by a factor of 2-3. However, it slightly increases the friction coef ficient from 0.07 to 0.09. After being stored in an atmosphere of 100% RH for 120 h, Ag+-modified MoS2 films showed an increase in wear life by a factor of 8 compared with that of as-deposited MoS2 films stored under the same conditions. These results indicate that Ag implantatio n enhances the moisture resistance of the sputtered MoS2 films. The re lationship between the chemical changes of the sputtered MoS2 films an d their moisture resistance is also discussed.