HIGH-SPEED INTEGRATED-CIRCUIT PROBING USING A SCANNING FORCE MICROSCOPE SAMPLER

Authors
HO F HOU AS BLOOM DM
Citation
F. Ho et al., HIGH-SPEED INTEGRATED-CIRCUIT PROBING USING A SCANNING FORCE MICROSCOPE SAMPLER, Electronics Letters, 30(7), 1994, pp. 560-562
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
30
Issue
7
Year of publication
1994
Pages
560 - 562
Database
ISI
SICI code
0013-5194(1994)30:7<560:HIPUAS>2.0.ZU;2-A
Abstract
Using a scanning force microscope as a high-speed all-electrical sampl er, the authors have probed voltages on internal nodes of integrated c ircuits. The authors have demonstrated non-invasive probing through a passivating layer and probing of an Intel 80486 microprocessor.