D. Araujo et al., DETERMINATION OF THE LATERAL DISTRIBUTION OF ELECTRON-HOLE PAIRS GENERATED BY AN ELECTRON-BEAM IN AL0.4GA0.6AS BY CATHODOLUMINESCENCE, Materials science & engineering. B, Solid-state materials for advanced technology, 24(1-3), 1994, pp. 124-129
The cathodoluminescence mode of the scanning electron microscope is us
ed for the first time to investigate the lateral dependence of the ele
ctron-hole pair generation by the electron beam of the scanning electr
on microscope m semiconducting material. A multiple-quantum-well struc
ture acts as a detector to measure the relative number of generated ca
rriers by their radiative recombination. The method, which avoids the
effect of carrier diffusion, enhances the resolution of the measuremen
t to 50 nm and should prove a help for the quantitative interpretation
of cathodoluminescence evaluations.