APPLICATION ASPECTS OF BEAM INJECTION METHODS

Authors
BRESSE JF
Citation
Jf. Bresse, APPLICATION ASPECTS OF BEAM INJECTION METHODS, Materials science & engineering. B, Solid-state materials for advanced technology, 24(1-3), 1994, pp. 229-232
Citations number
5
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
24
Issue
1-3
Year of publication
1994
Pages
229 - 232
Database
ISI
SICI code
0921-5107(1994)24:1-3<229:AAOBIM>2.0.ZU;2-B
Abstract
This paper gives guidelines to help those who want to characterize a s emiconductor sample or device. A short overview of the existing beam i njection techniques is presented. Orders of magnitude of spatial resol ution and sensitivity are given for each technique when topographical, electrical or thermal properties are used. Perspectives for future us e are also given, together with further improvement of the existing me thods, and use of new techniques.