The combined gas-sensing properties of a thin SnO2 layer and an underl
ying surface p-n junction are used for creating a solid-state humidity
sensor. The dependence of the device response behaviour on pulsed-vol
tage measuring conditions is investigated. A strong dependence on puls
e duration and pulse/pause ratio is observed. A model for explaining t
he device behaviour, based on the voltage dependence of the sorption p
henomena during the pulse and pause durations, is proposed. A good agr
eement with the experimental results is obtained.