INVESTIGATION OF THE REACTIONS OF THE ETHYLCHLOROSILANES, TETRAETHYLSILANE AND TRIETHYLSILANOL WITH O((3)P)

The reactions of tetraethylsilane, triethylchlorosilane, diethyldichlo rosilane, ethyltrichlorosilane and triethylsilanol with atomic oxygen in the ground state [O(3P)] have been measured in a discharge flow sys tem with mass spectrometric detection. All measurements were performed in an excess of O-atoms in the temperature range of 298 K < T < 773 K . The following Arrhenius expressions for the bimolecular rate constan ts were obtained: k(tetraethylsilane) = (1.1 +/- 0.2) x 10(13) x exp ( - 1645 +/- 330 K/T) cm3 mol-1 s-1 k(triethylchlorosilane) = (6.4 +/- 1 .3) x 10(12) x exp (- 1801 +/- 360 K/T) cm3 mol-1 s-1 k(diethyldichlor osilane) = (5.5 +/- 1.1) x 10(12) x exp (- 1840 +/- 370 K/T) cm3 mol-1 s-1 k(ethyltrichlorosilane = (3.4 +/- 0.7) x 10(12) x exp (- 2167 +/- 430 K/T) cm3 mol-1 s-1 k(triethylsilanol) = (7.0 +/- 1.4) x 10(12) X exp (- 1722 +/- 340 K/T) cm3 mol-1 s-1. The primary reaction paths are briefly discussed.