METHOD FOR IMAGING SIDEWALLS BY ATOMIC-FORCE MICROSCOPY

We demonstrate a new method for imaging vertical and near vertical sur face features by atomic force microscopy (AFM). It is based on an attr active force mode AFM, equipped with a special boot-shaped tip, couple d with a measurement of slope and with a special tracking technique. S urface profiling is achieved through a novel servo and scanning system . Mapping sidewall profile opens the door to measurement of critical d imensions (width and wall angles) of lines and trenches in integrated circuits, with high accuracy.