PLUME-SUBSTRATE INTERACTION IN PULSED-LASER DEPOSITION OF HIGH-TEMPERATURE SUPERCONDUCTING THIN-FILMS

The interaction between a substrate and an expanding plume, which is p roduced in a pulsed-laser deposition process of high-temperature super conducting thin films, has been investigated by observing one-dimensio nal laser-induced fluorescence images of ablated yttrium oxide molecul es. The results show the importance of fluid-like interactions of the ablated particles with the substrate. In relatively high oxygen pressu re, it is found that the ablated particles are reflected and stagnate in front of the substrate, and are then transported by diffusion onto the substrate.