OPTIMIZATION OF HIGHLY REFLECTIVE MULTILA YER MIRRORS FOR THE RANGE 100-150 NM

Authors
BALAKIREVA LL VINOGRADOV AV KOZHEVNIKOV IV
Citation
Ll. Balakireva et al., OPTIMIZATION OF HIGHLY REFLECTIVE MULTILA YER MIRRORS FOR THE RANGE 100-150 NM, Kvantovaa elektronika, 20(9), 1993, pp. 933-935
Citations number
8
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Kvantovaa elektronika → ACNP
ISSN journal
03687147
Volume
20
Issue
9
Year of publication
1993
Pages
933 - 935
Database
ISI
SICI code
0368-7147(1993)20:9<933:OOHRMY>2.0.ZU;2-T
Abstract
Layer thickness of highly reflective periodic and non-periodic multila yer MgF2/LiF, LiF/Al, and MgF2/Al mirrors was numerically optimized fo r the range 100 - 150 nm. It is shown that the reflection coefficient may reach 99 - 99.9 %.