A 3X3 PYROELECTRIC DETECTOR ARRAY WITH IMPROVED SENSOR TECHNOLOGY

Authors
VONMUNCH W NAGELE M WOHL G PLOSS B RUPPEL W
Citation
W. Vonmunch et al., A 3X3 PYROELECTRIC DETECTOR ARRAY WITH IMPROVED SENSOR TECHNOLOGY, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 156-160
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
41
Issue
1-3
Year of publication
1994
Pages
156 - 160
Database
ISI
SICI code
0924-4247(1994)41:1-3<156:A3PDAW>2.0.ZU;2-D
Abstract
A 3 x 3 pyroelectric array with P(VDF/TrFE) copolymer films on integra ted CMOS circuits is described. The maximum specific detectivity of th e sensors is in the order of 10(7) cm square-root Hz/W. An improved te chnology for the poling process is discussed. In order to achieve maxi mal sensitivity of a thermal IR sensor, an efficient absorption of the incident radiation is necessary. Results of the technology and the pr operties of thin nickel films as absorbers are presented.