MICROMACHINED OPTICAL PLANES AND REFLECTORS IN SILICON

Authors
ROSENGREN L SMITH L BACKLUND Y
Citation
L. Rosengren et al., MICROMACHINED OPTICAL PLANES AND REFLECTORS IN SILICON, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 330-333
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
41
Issue
1-3
Year of publication
1994
Pages
330 - 333
Database
ISI
SICI code
0924-4247(1994)41:1-3<330:MOPARI>2.0.ZU;2-J
Abstract
Anisotropic wet etching of silicon in KOH has been used to form micros tructures for optical applications. Two optical beam splitters are pre sented which both make use of the well-defined 45-degrees angle betwee n the [100] and [110] directions. In the [100] direction, vertical wal ls and comers are used as optical mirrors, and in the [110] direction, V-grooves bounded by {111} planes are used for optical fiber alignmen t.