We propose a compact, high-bandwidth optoelectronic S-parameter test s
tructure and characterize its performance via electrooptic sampling ov
er a 500-GHz frequency range. The test structure is shown to be well-b
ehaved over a 300-GHz bandwidth, with further improvement potential. A
ctive devices can be wirebonded into the structure for characterizatio
n, or they can be integrated on-wafer for improved performance.