F. Flory et al., GUIDED-WAVE CHARACTERIZATION TECHNIQUES FOR THE COMPARISON OF PROPERTIES OF DIFFERENT OPTICAL COATINGS, Optical engineering, 33(5), 1994, pp. 1669-1677
The specific behavior of optical thin films very often leads to limita
tions of optical system performance. Accurate characterization techniq
ues for evaluating film properties are necessary to understand this be
havior. Characterization techniques based on the propagation of guided
waves in the thickness of the films appear to be very useful. We repo
rt our particular way to determine the refractive index and the thickn
ess of both isotropic and anisotropic thin films. Guided-waves techniq
ues are sensitive enough to detect slight variations of thin film opti
cal constants, so we use them to study the variations of refractive in
dex versus temperature. From this we can obtain the thermorefractive c
oefficients partial derivative n/partial derivative T of our layers. M
oreover, we can obtain, in some cases, the nonlinear refractive index
coefficient. We also measure guided-wave attenuation and laser damage
threshold with a digital imaging system. These means, dependent on gui
ded waves, are used in combination for a comparative analysis of TiO2
and Ta2O5 layers made by different deposition techniques (conventional
evaporation, ion assisted deposition and ion plating).