The gas-sensing characteristics of Fe2O3 thin films prepared by the el
ectron-beam evaporation method are presented. The Fe2O3 films show a h
igh selectivity and sensitivity to petrol vapours. The response and re
covery times and reproducibility of the gas-sensitive elements are stu
died. The obtained results shows the possibility of using Fe2O3 thin f
ilms as material for semiconductor thin-film petrol vapour sensors.