REACTIVITY AND MECHANISM IN THE CHEMICAL-VAPOR-DEPOSITION OF LATE TRANSITION-METALS

An overview is given of the current knowledge of factors influencing r eactivity and mechanism in the chemical vapour deposition of the late transition elements from organometallic precursors. Attention is focus sed on the CVD of platinum and gold as examples of catalytically activ e and non-active metals respectively, and the mechanisms of thermolysi s at the gas/solid and solution/solid interfaces are compared.