SPUTTERING EFFECTS OF GARNETS

Authors
PRIGGEMEYER S BOMERMANN J ALBERS T KOSCHMIEDER H HEILAND W
Citation
S. Priggemeyer et al., SPUTTERING EFFECTS OF GARNETS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 88(3), 1994, pp. 244-246
Citations number
9
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
88
Issue
3
Year of publication
1994
Pages
244 - 246
Database
ISI
SICI code
0168-583X(1994)88:3<244:SEOG>2.0.ZU;2-J
Abstract
Garnets are oxidic materials of interest for magneto-optical applicati ons including optical waveguides. In the context of sputter depth prof iling of those materials etch rates are measured and preferential sput tering is observed. The experimental results are compared with TRIDYN calculations. The satisfactory agreement between experiment and calcul ations leads to the conclusion that the sputtering in these materials is dominated by collisional effects.