B. Rajchel et al., ADAPTATION OF THE 70 KV INP ION IMPLANTER TO THE IBAD TECHNIQUE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 89(1-4), 1994, pp. 342-345
The ion implanter facility of the Institute of Nuclear Physics in Crac
ow was used during many years in different fields of research and tech
nical application. This laboratory type machine equipped with a mass a
nalyzer gives the possibility to accelerate single charged ions of alm
ost all the elements up to the energy of 70 keV with the beam current
reaching (e.g. for N2+) several mA. Mass resolution of the implanter i
s about 350, and the typical current density during implantation is in
the range of 0.1 muA/cm2 to 100 muA/cm2. Adaptation works at the INP
implanter to the Ion Beam Assisted Deposition technique were performed
. The present research activity due to the modified implanter includes
: investigation of high temperature corrosion resistant surfaces (allo
ys of the type Al-Mo); investigation of special (e.g. ceramics, compos
ites) thin layers produced on crystal surfaces; production of the surf
aces of improved mechanical properties. Targets produced by the IBAD t
echnique are investigated next by the RBS method using a 3 MV Van de G
raaff setup at the Institute of Nuclear Physics in Cracow.