ADAPTATION OF THE 70 KV INP ION IMPLANTER TO THE IBAD TECHNIQUE

The ion implanter facility of the Institute of Nuclear Physics in Crac ow was used during many years in different fields of research and tech nical application. This laboratory type machine equipped with a mass a nalyzer gives the possibility to accelerate single charged ions of alm ost all the elements up to the energy of 70 keV with the beam current reaching (e.g. for N2+) several mA. Mass resolution of the implanter i s about 350, and the typical current density during implantation is in the range of 0.1 muA/cm2 to 100 muA/cm2. Adaptation works at the INP implanter to the Ion Beam Assisted Deposition technique were performed . The present research activity due to the modified implanter includes : investigation of high temperature corrosion resistant surfaces (allo ys of the type Al-Mo); investigation of special (e.g. ceramics, compos ites) thin layers produced on crystal surfaces; production of the surf aces of improved mechanical properties. Targets produced by the IBAD t echnique are investigated next by the RBS method using a 3 MV Van de G raaff setup at the Institute of Nuclear Physics in Cracow.