A HEAVY-ION IMPLANTING FACILITY AT THE CHIANG-MAI-UNIVERSITY

Authors
SUWANNAKACHORN D BOONYAWAN D GREEN JP AUMKAEW S THONGLEURM C VICHAISIRIMONGKOL P VILAITHONG T
Citation
D. Suwannakachorn et al., A HEAVY-ION IMPLANTING FACILITY AT THE CHIANG-MAI-UNIVERSITY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 89(1-4), 1994, pp. 354-356
Citations number
6
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
89
Issue
1-4
Year of publication
1994
Pages
354 - 356
Database
ISI
SICI code
0168-583X(1994)89:1-4<354:AHIFAT>2.0.ZU;2-A
Abstract
Nitrogen ion implantation is widely used to improve the wear and corro sion resistance of metals and alloys. Different kinds of ions, includi ng metal and heavier ions can be used for this purpose. The proposed i on implanter as a 0-degrees and a 45-degrees-beam line. The 0-degrees- beam line has been installed and tested by using an RF source with an ion energy of about 140 keV. The nitrogen beam current is about 200 mu A at the target position. The beam can be magnetically swept to cover a 10 cm x 10 cm target area. Preliminary tests with an ion dose of abo ut 10(17) ions/cm2 improved the hardness of stainless steel and alumin ium samples. The 45-degrees-beam line and the analyzing magnet are und er construction. When this will be completed, the present RF ion sourc e will be replaced by a Danfysik 910 ion source which can be used for producing metal and heavier ions.