WAVE-GUIDING STRUCTURES IN POLYMERS BY ION-IMPLANTATION

Authors
BRUNNER S RUCK DM FRANK WFX LINKE F SCHOSSER A BEHRINGER U
Citation
S. Brunner et al., WAVE-GUIDING STRUCTURES IN POLYMERS BY ION-IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 89(1-4), 1994, pp. 373-378
Citations number
3
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
89
Issue
1-4
Year of publication
1994
Pages
373 - 378
Database
ISI
SICI code
0168-583X(1994)89:1-4<373:WSIPBI>2.0.ZU;2-Q
Abstract
Optical waveguides have been produced by ion irradiation of the surfac e of polymer blocks of poly-(methyl-meth-acrylate) (PMMA). ion energie s in the range of keV and MeV have been used. Mask construction is des cribed. Strip waveguides, branches and Mach-Zehnder interferometers we re generated. The refractive index as a function of the depth will be discussed.