Ea. Sanchez et al., ELECTRON-EMISSION IN 10-100KEVH-SURFACE COLLISIONS( AND HE+ GRAZING ION), Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 90(1-4), 1994, pp. 261-265
We have measured energy distributions of electrons ejected during graz
ing 10-100 keV H+ and He+ ions scattering from Si surfaces for a broad
range of electron observation angles. The distributions have contribu
tions strongly dependent on the directions of incidence and observatio
n. For observation regions around the specular reflection of the ions
we have studied the angular dependence of the electron structure resul
ting from electron transfer to the continuum of the effective ion pote
ntial. Far from the ion scattering plane we have observed the Si Auger
electron spectrum. We discuss the differences between the Auger peaks
obtained by electron and grazing proton bombardment of Si surfaces pa
rtially covered with O2 and Al.