RANGE DISTRIBUTION OF FLUORINE IN F-19(-IMPLANTED LINBO3())

Depth profiles of fluorine in F-19+ implanted LiNbO3 have been accurat ely measured using the F-19(p, alphagamma)O-16 resonant nuclear reacti on at E(R) = 872.1 keV, with GAMMA = 4.2 keV. A proper convolution cal culation method was used to extract the true distribution of fluorine from the experimental excitation yield curves. The experimental range distribution parameters, R(p) and DELTAR(p), were compared with those obtained by Monte Carlo simulation using a computer code developed rec ently in this group and with results obtained using the TRIM90 code. I t shows that the experimental R(p) values agree with the Monte Carlo s imulation values very well, while the experimental DELTAR(p) values ar e larger than those obtained from the simulations. The simulation with our computer code improves the agreement between the experimental and calculated range straggling, DELTAR(p).