DENSITY-MEASUREMENT OF AMORPHOUS SIXGE1-X ALLOYS

Authors
LAAZIRI K ROORDA S CLICHE L
Citation
K. Laaziri et al., DENSITY-MEASUREMENT OF AMORPHOUS SIXGE1-X ALLOYS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 90(1-4), 1994, pp. 438-441
Citations number
12
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
90
Issue
1-4
Year of publication
1994
Pages
438 - 441
Database
ISI
SICI code
0168-583X(1994)90:1-4<438:DOASA>2.0.ZU;2-H
Abstract
The atomic density of amorphous SixGe1-x alloys (x = 1, 0.85, 0.67, 0. 50, 0.20 and 0) has been measured. Mono-crystalline SixGe1-x layers we re implanted with 1.50-2.75 MeV Si2+ and Ge2+ ions to produce the amor phous material. Using surface profilometry and RBS/channeling, it was found that amorphous alloys are less dense than the crystalline alloys , and that Vegard's law underestimates the a-SixGe1-x density.