The kinetic roughening behavior of vicinal Si(001) surfaces is studied
with scanning tunneling microscopy. By analyzing the height-height co
rrelation function of the Si layers that have been grown we found, in
the case of islands growth, an algebraic roughening behavior with a ro
ughness exponent of 0.68 +/- 0.05. In the step flow mode, however, we
found non-algebraic roughening behavior.